The 60th JSAP Spring Meeting,2013

Presentation information

Print

Symposium(Oral presentation)

Symposium » ・The frontiers of SiC power electronics technology ～prospects of wide-range practical applications and survey of remaining issues～

[27p-G22-1~10] The frontiers of SiC power electronics technology ～prospects of wide-range practical applications and survey of remaining issues～

Wed. Mar 27, 2013 1:00 PM - 6:00 PM G22 (B5 4F-2406)

[27p-G22-3] Development of production technology for SiC epitaxial wafers

○Takayuki Sato1 (SHOWA DENKO K.K.1)

Keywords:SiC、エピタキシャルウェハ、パワー半導体