[27p-PA2-1~22] 5.3 Optical Control

[27p-PA2-17] Trial fabrication of 8x8 Si Matrix-Switch

^○Keijiro Suzuki¹, Takashi Matsukawa², Morifumi Ohno², Guangwei Cong¹, Sang-Hun Kim¹, Satoshi Suda¹, Tadashi Chiba², Hirofumi Tadokoro², Masashi Yanagihara², Yasushi Igarashi², Meishoku Masahara², Hitoshi Kawashima¹ (Network Photonics Research Centre, AIST¹, Nanoelectronics Research Inst., AIST²)

Keywords:光スイッチ、シリコンフォトニクス、マトリックススイッチ