[27p-PA4-1~17] 8. Plasma Electronics

[27p-PA4-7] Langmuir Probe Characterization of Hydrogen Plasma for the Production of Nanocrystalline Diamond (8.2)

^○Camille Faith Romero¹, Masaru Yamanaka¹, Motoi Wada¹ (Graduate School of Engineering, Doshisha University¹)

Keywords:Langmuir probe、Nanocrystalline、ECR plasma