[27p-PB4-1~16] 13.5 Si process technology

[27p-PB4-1] Crystallization Process of Amorphous Germanium Thin Films by Surfactant-Crystallization Method using Ag

^○Naoya Mishiba¹, Masayuki Tanaka¹, Yousuke Inase¹, Hiroyuki Miura¹, Masao Kamiko², Kentaro Kyuno¹ (Shibaura Institute of Technology¹, Institute of Industrial Science, University of Tokyo²)

Keywords:Surfactant-Crystallization