Crystallization of Germanium by Metal Induced Crystallization method using Gold

Presentation information

Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

Wed. Mar 27, 2013 1:30 PM - 3:30 PM PB4 (2nd gymnasium)

^○Toru Kanazawa¹, Yousuke Inase¹, Hiroyuki Miura¹, Masao Kamiko², Kentaro Kyuno¹ (Shibaura Inst Univ.¹, Toudai Inst.²)

Keywords:MIC、薄膜