The 60th JSAP Spring Meeting,2013

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Regular sessions(Poster presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

[27p-PB4-1~16] 13.5 Si process technology

Wed. Mar 27, 2013 1:30 PM - 3:30 PM PB4 (2nd gymnasium)

[27p-PB4-3] Crystallization Process of Amorphous Silicon by Surfactant-Crystallization Method

○Yuki Iijima1, Jun Takayanagi1, Tosinori Takee1, Masao Kamiko2, Kentaro Kyuno1 (Shibaura Inst.1, Todai Inst.2)

Keywords:MIC、SC