[27p-PB4-1~16] 13.5 Si process technology

[27p-PB4-11] Impact of Carbon Coimplantation on Boron Activation in Silicon

^○Yasuo Shimizu¹, Hisashi Takamizawa¹, Koji Inoue¹, Fumiko Yano^1,2, Yasuyoshi Nagai¹ (IMR Tohoku Univ.¹, Tokyo City Univ.²)

Keywords:アトムプローブ、炭素、共注入