The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[28a-A6-1~10] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 9:00 AM - 11:45 AM A6 (K1 3F-305)

[28a-A6-3] Classification of DLC film and its resistivity

○Hisashi Yoshioka1, Shigeo Ohshio1, Ikumi Toda1, Hiroyuki Muramatsu1, Hidetoshi Saitoh1 (Nagaoka Univ. Tech.1)

Keywords:ダイヤモンドライクカーボン、抵抗率