[28a-A6-1~10] 6.2 Carbon-based thin films

[28a-A6-4] Effect on structure of water mixed into deposition process of amorphous carbon film deposited with benzene

^○Xiaolong Zhou¹, Ikumi Toda¹, Shigeo Ohshio¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:アモルファス炭素膜、ベンゼン、混入水