The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[28a-A6-1~10] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 9:00 AM - 11:45 AM A6 (K1 3F-305)

[28a-A6-6] △Increase in Preparation Rate of Hydrogen-free DLC Film on Bottom of Narrow Hole

○Yusuke Morita1, Hideto Tanoue1, Yoshiyuki Suda1, Hirofumi Takikawa1, Masao Kamiya2, Makoto Taki3, Yushi Hasegawa3, Nobuhiro Tsuji3, Saleh Abusuilik4 (Toyohashi Univ. Technol.1, Itoh Optical Ind. Co., Ltd.2, Onward Ceramic Coating Co., Ltd.3, Hitachi Tool Eng., Ltd.4)

Keywords:Diamond-lke carbon、細孔底面