[28a-A6-1~10] 6.2 Carbon-based thin films

[28a-A6-7] △Uniform Coating of Hydrogen-Free DLC Film on Si Wafer and its Micro-Fabrication

^○Michinari Hosoo¹, Hideto Tanoue¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Takahiro Kawashima¹, Takayuki Shibata¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Abusuilik Saleh⁴, Nobuhiro Tsuji³ (Toyohashi Univ. of Technol.¹, Itoh Opt. Ind. Co., Ltd.², Onward Ceramic Coating Co., Ltd.³, Hitachi Tool Eng., Ltd.⁴)

Keywords:ダイヤモンドライクカーボン、微細加工、均一成膜