The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[28a-A6-1~10] 6.2 Carbon-based thin films

Thu. Mar 28, 2013 9:00 AM - 11:45 AM A6 (K1 3F-305)

[28a-A6-8] TDS Analysis of Hydrogenated DLC (ta-C:H and a-C:H) films

○Hideto Tanoue1, Tomoaki Kadoguchi1, Yoshiyuki Suda1, Hirofumi Takikawa1, Masao Kamiya2, Makoto Taki3, Yushi Hasegawa3, Mobuhiro Tsuji3, Saleh Abusuilik4 (Toyohashi Univ. Technol.1, Itoh Opt. Ind. Co., Ltd.2, Onward Ceramic Coating Co., Ltd.3, Hitachi Tool Eng. Co., Ltd.4)

Keywords:ダイヤモンドライクカーボン、昇温脱離質量分析、昇温速度