[28a-G19-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28a-G19-11] Effects of Deposition Temperature and Annealing on V-doped ZnO Thin Films

^○Tatsuya Mori¹, Takuya Matsuo¹, Shuhei Okuda¹, Hiroshi Chiba¹, Katsuyoshi Washio¹ (Tohoku Univ.¹)

Keywords:酸化亜鉛、V、anneal