The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

21. Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[28a-G19-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Mar 28, 2013 10:00 AM - 1:00 PM G19 (B5 4F-2403)

[28a-G19-8] Growth and Characterization of Vanadium-Doped ZnO Thin Films by RF Magnetron Sputtering

○Shuhei Okuda1, Takuya Matsuo1, Hiroshi Chiba1, Tatsuya Mori1, Katsuyoshi Washio1 (Tohoku Univ.1)

Keywords:ZnO、光音響