[28a-G2-1~12] 13.3 Insulator technology

[28a-G2-10] ▼Improvement of Al₂O₃/InGaAs Interfaces by Ultrathin Ga Oxide Passivation

^○（PC）Wipakorn Jevasuwan¹, Tatsuro Maeda¹, Noriyuki Miyata¹, Minoru Oda¹, Toshifumi Irisawa¹, Tsutomu Tezuka¹, Tetsuji Yasuda¹ (GNC-AIST¹)

Keywords:Insulator, InGaAs