[28a-G2-1~12] 13.3 Insulator technology

[28a-G2-11] △Fabrication of GaSb MOS Capacitor on GaAs Substrates

^○（B）Takahiro Gotow^1,2, Shinsuke Hara¹, Hiroki I Fujishiro¹, Mutsuo Ogura², Tetsuji Yasuda², Tatsuro Maeda² (Tokyo University of Science¹, AIST²)

Keywords:GaSb、Al2O3