Optical Properties of GaN Templates Fabricated by Nano-channel FIELO Method

Masanori Nambu

Presentation information

Regular sessions(Oral presentation)

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[28a-G21-1~11] 15.4 III-V-group nitride crystals

Thu. Mar 28, 2013 9:00 AM - 12:00 PM G21 (B5 4F-2405)

[28a-G21-7] Optical Properties of GaN Templates Fabricated by Nano-channel FIELO Method

^○Masanori Nambu¹, Hitoshi Manabe¹, Kemta Uchida¹, Atushi A. Yamaguchi¹, Hiroki Goto², Haruo Sunakawa², Toshiharu Matueda², Akiko Okada³, Hidetoshi Shinohara⁴, Hiromi Nishihara⁴, Hiroshi Goto⁴, Jun Mizuno³, Akira Usui² (Kanazawa Inst. of Tech.¹, Furukawa Co Ltd.², Waseda Univ.³, Toshiba Machine Co Ltd.⁴)

Keywords:GaN、残留歪み、反射スペクトル