The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[28a-G21-1~11] 15.4 III-V-group nitride crystals

Thu. Mar 28, 2013 9:00 AM - 12:00 PM G21 (B5 4F-2405)

[28a-G21-8] △Control of nucleation for HVPE growth of AlN on 6H-SiC substrate

○Shin Kitagawa1, Hideto Miyake1, Kazumasa Hiramatsu1 (Mie univ.1)

Keywords:窒化物半導体、HVPE、6H-SiC