[28a-G22-1~13] 15.6 IV-group-based compounds

[28a-G22-4] ▲The effect of the solution flow velocity on the surface morphology in the solution growth of SiC

^○Can Zhu¹, Shunta Harada¹, Kazuaki Seki¹, Miho Tagawa¹, Yuji Matsumoto², Tomohisa Kato^3,4, Kazuo Kurashige^4,5, Hajime Okumura^3,4, Toru Ujihara¹ (Nagoya Univ.¹, Tokyo Tech², AIST³, FUPET⁴, Hitachi Chemical⁵)

Keywords:solution flow velocity、surface roughness