△High-Precision Alignment of Electron Tomography Tilt Series Using Markers Formed by Helium Ion Microscope

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

Thu. Mar 28, 2013 10:00 AM - 12:45 PM G6 (B5 1F-2106)

^○Misa Hayashida¹, Tomohiko Iijima¹, Masahiro Tsukahara¹, Shiniichi Ogawa¹ (AIST¹)

Keywords:電子顕微鏡、三次元、アライメント