[28a-G6-1~11] 13.5 Si process technology

[28a-G6-4] Development of Minimal Laser Heating Equipment

^○Takashi Chiba^1,2, Masao Terada^1,2, Sommawan Khumpuang^2,3, Shinichi Ikeda^2,3, Takashi Yajima², Shiro Hara^2,3 (Sakaguchi E.H VOC Corp.¹, Minimal Fab Development Association², AIST³)

Keywords:ミニマルレーザ加熱装置、ミニマルファブ、レーザ加熱