[28a-G6-1~11] 13.5 Si process technology

[28a-G6-5] Wafer Transfer System in the Minimalfab

^○Hitoshi Maekawa^{1, 2}, Sommawan Khumpuang^{1, 2}, Shiro Hara^{1, 2} (AIST¹, MINIMAL²)

Keywords:ミニマル、搬送、局所クリーン化