The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

[28a-G6-1~11] 13.5 Si process technology

Thu. Mar 28, 2013 10:00 AM - 12:45 PM G6 (B5 1F-2106)

[28a-G6-6] Detection of Temperature by Reflection of Al Thin Film

Isamu Taguchi1, Masahiko Mitsuhashi1, Nobuo Matsumoto2, ○Toshio Kato2, Ｋｅｎ Ｏｔａｊｉｍａ3, Ｒｅｉｋｏ Ｋａｎｚａｋｉ3 (Kanagawa Industrial Technology Research institute1, Co., Ltd G-Quest2, Asey Indutrial Co.,Ltd3)

Keywords:温度測定、半導体プロセス