The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

[28a-G6-1~11] 13.5 Si process technology

Thu. Mar 28, 2013 10:00 AM - 12:45 PM G6 (B5 1F-2106)

[28a-G6-7] Thin-Film Photosensor of Frequency Modulation Output Type

Takayuki Kadonome1, Atsushi Matsumura1, Tsuyoshi Higashiyama1, Shohei Oyama1, Tokiyoshi Matsuda1, Mutsumi Kimura1 (Ryukoku Univ.1)

Keywords:薄膜フォトセンサ、周波数変調出力方式