[28p-B2-1~13] 7.3 Lithography

[28p-B2-1] Ultra-Long Overhang Structure Growth by Real-Time Feedback Dose Control of Focused-Ion-Beam

^○Dengji Guo¹, Reo Kometani¹, Shin'ichi Warisawa¹, Sunao Ishihara¹ (The Univ. of Tokyo¹)

Keywords:集束イオンビーム化学気相成長法、実時間照射量制御、長尺