The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.3 Lithography

[28p-B2-1~13] 7.3 Lithography

Thu. Mar 28, 2013 1:30 PM - 5:00 PM B2 (K2 3F-1302)

[28p-B2-2] Etching from the Side of Si Block and Creating Three-Dimensional Nanostructure (2)

○Kenji Yamazaki1, Hiroshi Yamaguchi1 (NTT Basic Research Labs.1)

Keywords:3Dナノ加工、RIE、EBリソ