[28p-B2-1~13] 7.3 Lithography

[28p-B2-5] Development of Optical Lithography Process for Blazed Diffraction Grating

^○Kazuyuki Kakuta¹, Daisaku Sugi¹, Shigeru Matsui², Yoshisada Ebata², Tetsuya Watanabe², Norio Hasegawa² (Hitachi, Ltd., Micro Device Division¹, Hitachi High-Technologies corp.²)

Keywords:リソグラフィー、メムス、回折格子