[28p-B9-1~10] 9.3 Nanoelectronics

[28p-B9-7] Fabrication of Single-Nanometer-Sized Nanogap Electrode using Metalmask Lithograpuy

^○Yasuhisa Naitoh¹, Eri Okawa², Tatsuhiko Ohata², Masayo Horikawa¹, Fong. F. Wang² (NRI-AIST¹, Ibaraki Univ.²)

Keywords:ナノギャップ電極、電界破断、ナノギャップスイッチ効果