[28p-B9-1~10] 9.3 Nanoelectronics

[28p-B9-9] Fabrication of Integrated Nanogaps by Field-Emission-Induced Electromigration

^○Akihiro Hirata¹, Ryutaro Suda¹, Mitsuki Ito¹, Souichi Ishii¹, Jun-ichi Shirakashi¹ (Tokyo Univ. Agr. & Tech.¹)

Keywords:エレクトロマイグレーション、集積化、ナノギャップ