[28p-D3-1~17] 6.1 Ferroelectric thin films

[28p-D3-4] △Fabrication of PZT Thin film Islands by Focused Ion Beam Etching and Recovery Annealing Conditions

^○Haruki Tanaka¹, Naoya Yamagata¹, Takashi Nakajima², Takashi IIjima³, Souichirou Okamura¹ (Tokyo Univ. of Sci¹, Tohoku Univ², AIST³)

Keywords:収束イオンビーム、回復アニール、PZT