PZT multilayer thin films actuator fabricated on Si substrate

Presentation information

Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

Thu. Mar 28, 2013 2:00 PM - 6:45 PM D3 (C5 3F-324)

^○Masaya Kishimoto¹, Fumiya Kurokawa², Isaku Kanno¹ (Kobe Univ.¹, Kyoto Univ.²)

Keywords:PZT薄膜、積層アクチュエータ、MLCA