[28p-D3-1~17] 6.1 Ferroelectric thin films

[28p-D3-7] Influence of high voltage application on orientation, ferroelectric, and piezoelectric property of tetragonal composition PZT thin films

^○natsumi makimoto¹, ryutaro maeda¹, takahiro oikawa², aryumi wada², hiroshi funakubo², takeshi kobayashi¹ (AIST¹, Tokyo Tech.²)

Keywords:piezoelectric MEMS