[28p-D3-1~17] 6.1 Ferroelectric thin films

[28p-D3-8] Influence of high voltage application on the piezoelectric property of microfabricated MPB composition PZT films

^○takeshi kobayashi¹, natsumi makimoto¹, ryutaro maeda¹, takahiro oikawa², ayumi wada², hiroshi funakubo² (AIST¹, Tokyo Tech.²)

Keywords:piezoelectric MEMS