[28p-D3-1~17] 6.1 Ferroelectric thin films

[28p-D3-9] △Effect of high voltage application to MPB PZT thin films on microcantilevers

^○hideaki mizusaki¹, natsumi makimoto², ryutaro maeda², takahiro oikawa³, ayumi wada³, hiroshi funakubo³, takeshi kobayashi² (Nagano pref. gen. ind. tech. center¹, AIST², Tokyo Tech.³)

Keywords:piezoelectric MEMS