[28p-G2-1~16] 13.3 Insulator technology

[28p-G2-2] Planarization of Ge(111) Surface by H₂ Annealing

^○Tomonori Nishimura^1,2, Choong Hyun Lee^1,2, Kosuke Nagashio^1,2, Akira Toriumi^1,2 (The Univ. of Tokyo¹, JST-CREST²)

Keywords:平坦化