[28p-G2-1~16] 13.3 Insulator technology

[28p-G2-8] Inspection of Introduction GeN_x Diffusion Barrier Film to HfO₂/Ge Interface

^○Yohma Kuroyanagi¹, Yuya Nakatani¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (Tokyo Univ.of Agri.&Tech.¹)

Keywords:半導体