[28p-G6-1~17] 13.5 Si process technology

[28p-G6-10] Solid phase crystallization of an amorphous Si film on a crystallization-induction layer by pulse laser irradiation

^○Kazuhide Mochizuki¹, Lien Mai¹, Susumu Horita¹ (JAIST¹)

Keywords:多結晶Si、結晶化誘発層、固相結晶化、パルスレーザー