Leading Wave Crystallization of Amorphous Germanium Film Induced by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

Thu. Mar 28, 2013 2:00 PM - 6:30 PM G6 (B5 1F-2106)

^○（M1）Takahiro Kamikura¹, Shohei Hayashi¹, Seiji Morisaki¹, Yuji Fujita¹, Muneki Akazawa¹, Seiichiro Higashi¹ (Hiroshima Univ.¹)

Keywords:熱プラズマジェット、a-Ge、Leading Wave Crystallization