Electrical Characterization of SiNx Films Deposited by Reactive RF Sputtering

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

Thu. Mar 28, 2013 2:00 PM - 6:30 PM G6 (B5 1F-2106)

^○Tatsuya Okada¹, Keisuke Yagi¹, Kimihiko Imura¹, Takashi Noguchi¹ (Univ. Ryukyus.¹)

Keywords:Thin Film Transistor