Thin Si film deposition based on reducing effect of nanosilicon electron emitter

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.5 Si process technology

Thu. Mar 28, 2013 2:00 PM - 6:30 PM G6 (B5 1F-2106)

^○Ryutaro Suda¹, Mitsuki Ito¹, Akira Kojima¹, Jun-ichi Shirakashi¹, Nobuyoshi Koshida¹ (Tokyo Univ. Agr. & Tech.¹)

Keywords:電子源、薄膜堆積、還元