The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.2 Semiconductor surfaces

[28p-G8-1~14] 13.2 Semiconductor surfaces

Thu. Mar 28, 2013 1:00 PM - 4:45 PM G8 (B5 2F-2202)

[28p-G8-7] Formation of Si random inverted-pyramids by photoetching with N-fluoropyridinium salts

○Toshinori Hirano1, Junichi Uchikoshi1, Masaki Otani1, Takabumi Nagai2, Kenji Adachi2, Kentaro Kawai1, Kenta Arima1, Mizuho Morita1 (Osaka Univ.1, Daikin Industries, Ltd.2)

Keywords:逆ピラミッド、テクスチャ、エッチング