The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[28p-G9-1~18] 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

[28p-G9-10] Anisotropy in Si Nanowire Smoothing by Maskless Hydrogen Anneal

○(DC)Naoya Morioka1, Jun Suda1, Tsunenobu Kimoto1 (Kyoto Univ.1)

Keywords:Siナノワイヤ、Si nanowire、水素アニール