[28p-G9-10] Anisotropy in Si Nanowire Smoothing by Maskless Hydrogen Anneal
Keywords:Siナノワイヤ、Si nanowire、水素アニール
Presentation information
Regular sessions(Oral presentation)
13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology
[28p-G9-1~18] 13.6 Silicon devices / Integration technology
Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)