[28p-G9-1~18] 13.6 Silicon devices / Integration technology

[28p-G9-13] Flexible Vth FinFETs with 9-nm-Thick Extremely-Thin BOX

^○Kazuhiko Endo¹, Shinji Migita¹, Yuki Ishikawa¹, Yongxun Liu¹, Takashi Matsukawa¹, Shin-ichi O'uchi¹, Junichi Tsukada¹, Wataru Mizubayashi¹, Yukinori Morita¹, Hiroyuki Ota¹, Hiromi Yamauchi¹, Meishoku Masahara¹ (AIST Nanoele. Res. Inst¹)

Keywords:SOI、FinFET、極薄酸化膜