The 60th JSAP Spring Meeting,2013

Presentation information

Print

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.6 Silicon devices / Integration technology

[28p-G9-1~18] 13.6 Silicon devices / Integration technology

Thu. Mar 28, 2013 1:30 PM - 6:30 PM G9 (B5 2F-2203)

[28p-G9-15] Impact of Quasi-Ballistic Phonon Transport on Thermal Properties in FinFETs

○Kentaro Kukita1, Indra Nur Adisusilo1, Yoshinari Kamakura1,2 (Osaka Univ.1, JST CREST2)

Keywords:FinFET、フォノン、熱伝導