[28p-G9-1~18] 13.6 Silicon devices / Integration technology

[28p-G9-2] Improved Reliability of Atom Switch With Low Programming Voltage

^○Munehiro Tada¹, Toshitsugu Sakamoto¹, Makoto Miyamura¹, Naoki Banno¹, Koichiro Okamoto¹, Noriyuki Iguchi¹, Hiromitsu Hada¹ (LEAP¹)

Keywords:原子スイッチ、不揮発、低電圧