[28p-G9-1~18] 13.6 Silicon devices / Integration technology

[28p-G9-5] ▼Mass-detection Based In-plane Resonant Nano-electro-mechanical Sensors

^○（P）Faezeh Arab Hassani¹, Cecilia Dupre², Eric Ollier², Cornel Cobianu³, Silvia Armini⁴, Vladimir Cherman⁴, Adrian Mihai Ionescu⁵, Yoshishige Tsuchiya⁶, Hiroshi Mizuta^1,6 (JAIST¹, CEA-LETI², Honeywell³, IMEC⁴, EPFL⁵, Univ. of Southampton⁶)

Keywords:Nano-electro-mechanical sensor