[28p-G9-1~18] 13.6 Silicon devices / Integration technology

[28p-G9-6] ▲Monolithically integrated MOSFETs capable to drive silicon-wire-waveguide based thermal-optic Mach-Zehnder interferometer switches

^○Guangwei Cong¹, Takashi Matsukawa², Tadashi Chiba², Hirofumi Tadokoro², Masashi Yanagihara², Morifumi Ohno², Hitoshi Kawashima¹, Haruhiko Kuwatsuka¹, Yasushi Igarashi², Meishoku Masahara², Hiroshi Ishikawa¹ (AIST,NPRC¹, AIST,NeRI²)

Keywords:monolithic integration、MOSFET、MZI switch