[28p-PA3-1~5] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[28p-PA3-1] Molecular dynamics calculation on formation of void defects in Si and Ge crystals.

^○（M1）Shusaku Ota¹, Koji Sueoka¹ (Okayama prefectural univ.¹)

Keywords:原子空孔、シリコン単結晶、MD法