[28p-PA3-1~5] 15.8 Crystal evaluation, nanoimpurities and crystal defects

[28p-PA3-4] The evaluation of lattice displacement in hydrogen-ion implanted ZnO bulk single crystals by Rutherford backscattering spectrometry

^○（B）Takuya Kaida¹, Kazuma Kamioka¹, Takahiro Ida¹, Kazuo Kuriyama¹, Kazumasa Kushida² (Hosei Univ.¹, Osaka kyouiku Univ.²)

Keywords:水素イオン、ZnO、ラザフォード後方散乱法